ASIA unversity:Item 310904400/100077
English  |  正體中文  |  简体中文  |  Items with full text/Total items : 90570/105786 (86%)
Visitors : 16376138      Online Users : 305
RC Version 6.0 © Powered By DSPACE, MIT. Enhanced by NTU Library IR team.
Scope Tips:
  • please add "double quotation mark" for query phrases to get precise results
  • please goto advance search for comprehansive author search
  • Adv. Search
    HomeLoginUploadHelpAboutAdminister Goto mobile version


    Please use this identifier to cite or link to this item: http://asiair.asia.edu.tw/ir/handle/310904400/100077


    Title: Effect of Time and Temperature on Epitaxy Growth
    Authors: Aanand(Aanand);Sheu), 許健(Gene;Yang)*, 楊紹明(Shao-Ming;Lai), 賴秋仲(Ciou-Jhong;Imam), Syed(Syed Sarwar
    Contributors: 資訊工程學系
    Date: 2016-03
    Issue Date: 2016-08-08 11:54:17 (UTC+8)
    Abstract: The growth rate of epitaxy depends primarily on parameters such as source gas deposition temperature pressure and concentration. Most microelectronic circuits fabrication that use epitaxial wafers require a lightly epitaxial layer (1014-1017 atom/cm3) on a heavily doped substrate (1019-1021 atom/cm3). The distribution of vacancies and interstitials is important for the distribution of the high surface concentration enhancement of tail diffusivity and oxidation enhanced diffusion. We present the auto doping during the epitaxy growth process which is being ignored most of the time during the device fabrication. Also the defects which are formed during the growth of epitaxy. The present simulation solves for the transient interstitials distribution assuming that interstitials are at equilibrium with vacancies.
    Relation: China Semiconductor Technology International Conference
    Appears in Collections:[Department of Computer Science and Information Engineering] Journal Artical

    Files in This Item:

    File SizeFormat
    index.html0KbHTML195View/Open


    All items in ASIAIR are protected by copyright, with all rights reserved.


    DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library IR team Copyright ©   - Feedback