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    Please use this identifier to cite or link to this item: http://asiair.asia.edu.tw/ir/handle/310904400/89583


    Title: Nitrogen ratio and RTA optimization on sputtered TiN/SiO2/Si electrolyte-insulatoresemiconductor structure for pH sensing characteristics
    Authors: Ren, Chang;Ren, Chang;Ya, Chia-Ming;Yang, Chia-Ming;Lyu, Chengang;Lyu, Chengang;Hs, Chin-Yuan;Hsu, Chin-Yuan;Tsung-Cheng;Chen, Tsung-Cheng;Wa, Hau-Cheng;Wang, Hau-Cheng;Yang, Hao;Yang, Hao;Lin, Wei-Tse;Lin, Wei-Tse;Dorota, G.Pi;Dorota, G.Pijanowska;Wan, Jer-Chyi;Wang, Jer-Chyi;蔡宗叡;TSAI, JUNG-RUEY
    Contributors: 光電與通訊學系
    Date: 2015-03
    Issue Date: 2015-09-03 14:41:49 (UTC+8)
    Relation: VACUUM
    Appears in Collections:[光電與通訊學系] 博碩士論文

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